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P386 - Exit slit unit for soft X-ray synchrotron radiation at HERMES beamline at the synchrotron radiation source SOLEIL, France - Bestec GmbH
P386 - Exit slit unit for soft X-ray synchrotron radiation at HERMES beamline at the synchrotron radiation source SOLEIL, France - Bestec GmbH

P386 – Exit Slit Unit HERMES Soleil

Application

Exit slit unit for soft X-ray synchrotron radiation

Year of delivery

2014

Installation site

HERMES beamline at the synchrotron radiation source SOLEIL, France

Design Features

  • Double slit mechanism – vertically and horizontally defining slits.
  • Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.

  • OFHC slit blades.
  • Motorized and encoded translation of both slits transversal to the beam axis.

  • Motorized slit unit translation along beam axis.
  • Adjustable support structure.

Performance Features

  • Precision and slit opening repeatability smaller than 100 nm.
  • Parallelism smaller than 0.8 µm over 10 mm edge length.
  • Straightness smaller than 0.5 µm over 10 mm edgle length.
  • Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.

Outer Dimensions

P386 - Outer dimensions - Exit slit unit for soft X-ray synchrotron radiation at HERMES beamline at the synchrotron radiation source SOLEIL, France - Bestec GmbH

Technical specifications and performance values

General

Vacuum chamber

Chamber type

cylindrical, horizontal axis

Main flanges

DN160CF cluster flanges

Material

1.4301

Base pressure

10-10 mbar range

Translation along beam axis

Range

± 100 mm

Parasitic roll

< 100 µrad

Repeatability

< 10 µm

Resolution (design value)

1 µm /step (full step at actuator)

Horizontally defining slit (HDS)

Slit blades

Material

OFHC

Straightness

< 0.15 µm over 10 mm (1σ)

Parallelism

-0.07 µm /mm
(15 µm slit opening)
-0.07 µm /mm
(25 µm slit opening)
-0.12 µm /mm
(50 µm slit opening)

Slit opening

Range

2 µm to 6.7 mm

Repeatability

± 0.02 µm
(up to 345 µm slit opening)

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Slit translation

Range

-1.8 mm to +9.2 mm

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Vertically defining slit (VDS)

Slit blades

Material

OFHC

Straightness

< 0.10 µm over 10 mm (1σ)

Parallelism

-0.04 µm /mm
(15 µm slit opening)
-0.03 µm /mm
(25 µm slit opening)
-0.02 µm /mm
(50 µm slit opening)

Slit opening

Range

5.5 µm to 6.7 mm

Repeatability

± 0.08 µm
(up to 315 µm slit opening)

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Slit translation

Range

-3.2 mm to +7.5 mm

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Performance Test Results

Slit width calibration (HDS)
P386 - Slit width calibration (HDS) - Exit slit unit for soft X-ray synchrotron radiation at HERMES beamline at the synchrotron radiation source SOLEIL, France - Bestec GmbH
Slit opening repeatability (HDS)
P386 - Slit opening repeatability (HDS) - Exit slit unit for soft X-ray synchrotron radiation at HERMES beamline at the synchrotron radiation source SOLEIL, France - Bestec GmbH
Slit blades parallelism (HDS)
P386 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at HERMES beamline at the synchrotron radiation source SOLEIL, France - Bestec GmbH
Slit blades parallelism (HDS)
P386 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at HERMES beamline at the synchrotron radiation source SOLEIL, France - Bestec GmbH
Slit blades parallelism (HDS)
P386 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at HERMES beamline at the synchrotron radiation source SOLEIL, France - Bestec GmbH
Slit width deviation upon translation (HDS)
P386 - Slit width deviation upon translation (HDS) - Exit slit unit for soft X-ray synchrotron radiation at HERMES beamline at the synchrotron radiation source SOLEIL, France - Bestec GmbH
Slit width calibration (VDS)
P386 - Slit width calibration (VDS) - Exit slit unit for soft X-ray synchrotron radiation at HERMES beamline at the synchrotron radiation source SOLEIL, France - Bestec GmbH
Slit opening repeatability (VDS)
P386 - Slit opening repeatability (VDS) - Exit slit unit for soft X-ray synchrotron radiation at HERMES beamline at the synchrotron radiation source SOLEIL, France - Bestec GmbH
Slit blades parallelism (VDS)
P386 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at HERMES beamline at the synchrotron radiation source SOLEIL, France - Bestec GmbH
Slit blades parallelism (VDS)
P386 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at HERMES beamline at the synchrotron radiation source SOLEIL, France - Bestec GmbH
Slit blades parallelism (VDS)
P386 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at HERMES beamline at the synchrotron radiation source SOLEIL, France - Bestec GmbH
Slit width deviation upon translation (VDS)
P386 - Slit width deviation upon translation (VDS) - Exit slit unit for soft X-ray synchrotron radiation at HERMES beamline at the synchrotron radiation source SOLEIL, France - Bestec GmbH

Pictures