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P394 - Exit slit unit for soft X-ray synchrotron radiation at ESM beamline at synchrotron radiation source NSLS-II, USA - Bestec GmbH
P394 - Exit slit unit for soft X-ray synchrotron radiation at ESM beamline at synchrotron radiation source NSLS-II, USA - Bestec GmbH

P394 – Exit Slit Unit ESM (A-branch) NSLS-II

Application

Exit slit unit for soft X-ray synchrotron radiation

Year of delivery

2015

Installation site

ESM beamline at synchrotron radiation source NSLS-II, USA

Design Features

  • Double slit mechanism – vertically and horizontally defining slits.

  • Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.

  • OFHC slit blades.
  • Manual slit unit translation along beam axis.
  • Isolated bias plate with phosphorus screen.
  • Photodiode behind vertically defining slit.
  • Adjustable support structure.

Performance Features

  • Precision and slit opening repeatability smaller than 100 nm.
  • Parallelism smaller than 0.6 µm over 10 mm edge length.
  • Straightness smaller than 0.5 µm over 10 mm edgle length.
  • Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.

Outer Dimensions

P394 - Outer dimensions - Exit slit unit for soft X-ray synchrotron radiation at ESM beamline at synchrotron radiation source NSLS-II, USA - Bestec GmbH

Technical specifications and performance values

General

Vacuum chamber

Chamber type

cylindrical, horizontal axis

Main flanges

DN160CF cluster flanges

Material

1.4301

Base pressure

10-10 mbar range

Translation along beam axis
(manual)

Range

± 100 mm

Support structure
adjustment ranges

Height

± 5 mm

Lateral

± 5 mm

Longitudinal

± 5 mm

Yaw

± 1°

Horizontally defining slit (HDS)

Slit blades

Material

OFHC

Straightness

< 0.10 µm over 10 mm (1σ)

Parallelism

0.03 µm /mm
(10 µm slit opening)
0.01 µm /mm
(25 µm slit opening)
-0.01 µm /mm
(50 µm slit opening)

Slit opening

Range

4 µm to 9.7 mm

Repeatability

± 0.10 µm
(up to 370 µm slit opening)

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Vertically defining slit (VDS)

Slit blades

Material

OFHC

Straightness

< 0.10 µm over 10 mm (1σ)

Parallelism

-0.02 µm /mm
(15 µm slit opening)
-0.04 µm /mm
(25 µm slit opening)
-0.05 µm /mm
(50 µm slit opening)

Slit opening

Range

3 µm to 10 mm

Repeatability

± 0.02 µm
(up to 355 µm slit opening)

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Performance Test Results

Slit width calibration (HDS)
P394 - Slit width calibration (HDS) - Exit slit unit for soft X-ray synchrotron radiation at ESM beamline at synchrotron radiation source NSLS-II, USA - Bestec GmbH
Slit opening repeatability (HDS)
P394 - Slit opening repeatability (HDS) - Exit slit unit for soft X-ray synchrotron radiation at ESM beamline at synchrotron radiation source NSLS-II, USA - Bestec GmbH
Slit blades parallelism (HDS)
P394 - Slit blade parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at ESM beamline at synchrotron radiation source NSLS-II, USA - Bestec GmbH
Slit blades parallelism (HDS)
P394 - Slit blade parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at ESM beamline at synchrotron radiation source NSLS-II, USA - Bestec GmbH
Slit blades parallelism (HDS)
P394 - Slit blade parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at ESM beamline at synchrotron radiation source NSLS-II, USA - Bestec GmbH
Slit width calibration (VDS)
P394 - Slit width calibration (VDS) - Exit slit unit for soft X-ray synchrotron radiation at ESM beamline at synchrotron radiation source NSLS-II, USA - Bestec GmbH
Slit opening repeatability (VDS)
P394 - Slit opening repeatability (VDS) - Exit slit unit for soft X-ray synchrotron radiation at ESM beamline at synchrotron radiation source NSLS-II, USA - Bestec GmbH
Slit blades parallelism (VDS)
P394 - Slit blade parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at ESM beamline at synchrotron radiation source NSLS-II, USA - Bestec GmbH
Slit blades parallelism (VDS)
P394 - Slit blade parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at ESM beamline at synchrotron radiation source NSLS-II, USA - Bestec GmbH
Slit blades parallelism (VDS)
P394 - Slit blade parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at ESM beamline at synchrotron radiation source NSLS-II, USA - Bestec GmbH