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P414 - Exit slit unit for soft X-ray synchrotron radiation at EMIL soft X-ray beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
P414 - Exit slit unit for soft X-ray synchrotron radiation at EMIL soft X-ray beamline at BESSY, Helmholtz-Zentrum Berlin, Germany

P414 – Exit Slit Unit SISSY_soft EMIL BESSY

Application

Exit slit unit for soft X-ray synchrotron radiation

Year of delivery

2015

Installation site

EMIL soft X-ray beamline at BESSY, Helmholtz-Zentrum Berlin, Germany

This soft X-ray exit slit unit is part of the combined hard and soft X-ray EMIL beamlines at BESSY. The vacuum chamber accomodates not only the actual beam but also the passing hard X-ray beam of the neighbouring branch.

Design Features

  • Vertically defining slit with motorized and encoded slit opening.

  • Symmetric slit opening, non-linear opening characteristics.

  • OFHC slit blades.
  • Horizontally defining aperture with independent manual translation of the aperture blades.
  • Electrical isolation of horizontally defining aperture blades.
  • Motorized slit unit translation along beam axis.
  • Adjustable support structure.

Performance Features

  • Precision and slit opening repeatability smaller than 100 nm.
  • Parallelism smaller than 0.9 µm over 10 mm edge length.
  • Straightness smaller than 0.5 µm over 10 mm edgle length.
  • Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.

Outer Dimensions

P414 - Outer dimensions - Exit slit unit for soft X-ray synchrotron radiation at EMIL soft X-ray beamline at BESSY, Helmholtz-Zentrum Berlin, Germany

Technical specifications and performance values

General

Vacuum chamber

Chamber type

cylindrical, horizontal axis

Main flanges

DN160CF cluster flanges

Material

1.4301

Base pressure

10-9 mbar range

Translation along beam axis

Range

± 150 mm

Parasitic movement in
dispersion direction

< ± 3 µm

Parasitic movement in
horizontal direction

± 100 µm

Resolution (design value)

< 500 µm

Rotation around beam axis

Range

± 1° (in air only)

Resolution (design value)

2 µrad

Support structure
adjustment ranges

Longitudinal

± 10 mm

Vertical

± 10 mm

Lateral

± 10 mm

Pitch

± 1°

Roll

± 1°

Yaw

± 1°

Horizontally defining aperture

Aperture blades

Material

OFHC

Aperture opening

Range

-5 mm to +10 mm

Repeatability

< 50 µm

Resolution (design value)

10 µm

Vertically defining slit (VDS)

Slit blades

Material

OFHC

Straightness

< 0.10 µm over 10 mm (1σ)

Parallelism

0.03 µm /mm
(15 µm slit opening)
0.04 µm /mm
(25 µm slit opening)
0.08 µm /mm
(50 µm slit opening)

Slit opening

Range

2 µm to 5 mm

Repeatability

± 0.02 µm
(up to 490 µm slit opening)

Resolution (design value)

0.003 µm /motor fine step
(1/32, recommended)
0.01 µm /encoder count

Performance Test Results

Slit width calibration (VDS)
P414 - Slit width calibration (VDS) - Exit slit unit for soft X-ray synchrotron radiation at EMIL soft X-ray beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit opening repeatability (VDS)
P386 - Slit opening repeatability (VDS) - Exit slit unit for soft X-ray synchrotron radiation at HERMES beamline at the synchrotron radiation source SOLEIL, France - Bestec GmbH
Slit blades parallelism (VDS)
P414 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at EMIL soft X-ray beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit blades parallelism (VDS)
P414 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at EMIL soft X-ray beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit blades parallelism (VDS)
P414 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at EMIL soft X-ray beamline at BESSY, Helmholtz-Zentrum Berlin, Germany