Loading ...
P424 - Exit slit unit for soft X-ray synchrotron radiation at SIX beamline at synchrotron radiation source NSLS-II, USA, 2015 - Bestec GmbH
P424 - Exit slit unit for soft X-ray synchrotron radiation at SIX beamline at synchrotron radiation source NSLS-II, USA, 2015 - Bestec GmbH

P424 – Exit Slit Unit SIX NSLS-II

Application

Exit slit unit for soft X-ray synchrotron radiation

Year of delivery

2015

Installation site

SIX beamline at synchrotron radiation source NSLS-II, USA

Design Features

  • Double slit mechanism – vertically and one horizontally defining slits.

  • Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.
  • OFHC slit blades.
  • Electrical isolation of all slit blades.
  • Motorized and encoded translation of horizontally defining slit transversal to the beam axis.

  • Bias plate with adjustable YAG screen.
  • Adjustable support structure.

Performance Features

  • Precision and slit opening repeatability smaller than 150 nm.
  • Parallelism smaller than 0.7 µm over 10 mm edge length.
  • Straightness smaller than 0.5 µm over 10 mm edgle length.
  • Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.

Outer Dimensions

P424 - Outer dimensions - Exit slit unit for soft X-ray synchrotron radiation at SIX beamline at synchrotron radiation source NSLS-II, USA, 2015 - Bestec GmbH

Technical specifications and performance values

General

Vacuum chamber

Chamber type

cylindrical, horizontal axis

Main flanges

DN160CF cluster flanges

Material

1.4301

Base pressure

10-10 mbar range

Support structure
adjustment ranges

Height

± 15 mm

Lateral translation

± 15 mm

Longitudinal

± 15 mm

Pitch

± 2°

Roll

± 2°

Yaw

± 2°

Horizontally defining slit (HDS)

Slit blades

Material

OFHC

Straightness

< 0.35 µm over 10 mm (1σ)

Parallelism

-0.004 µm /mm
(10 µm slit opening)
-0.015 µm /mm
(25 µm slit opening)
-0.011 µm /mm
(50 µm slit opening)

Slit opening

Range

5 µm to 9.5 mm

Repeatability

± 0.15 µm
(up to 340 µm slit opening)

Resolution (design value)

0.006 µm /fine motor step
(1/16, recommended)
0.05 µm /encoder count

Slit translation

Range

-6.7 mm to +2.8 mm

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Vertically defining slit (VDS)

Slit blades

Material

OFHC

Straightness

< 0.10 µm over 20 mm (1σ)

Parallelism

-0.06 µm /mm
(10 µm slit opening)
-0.05 µm /mm
(25 µm slit opening)
-0.04 µm /mm
(50 µm slit opening)

Slit opening

Range

2.7 µm to 18 mm

Repeatability

± 0.04 µm
(up to 420 µm slit opening)

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Performance Test Results

Slit width calibration (HDS)
P424 - Slit width calibration (HDS) - Exit slit unit for soft X-ray synchrotron radiation at SIX beamline at synchrotron radiation source NSLS-II, USA, 2015 - Bestec GmbH
Slit opening repeatability (HDS)
P424 - Slit opening repeatability (HDS) - Exit slit unit for soft X-ray synchrotron radiation at SIX beamline at synchrotron radiation source NSLS-II, USA, 2015 - Bestec GmbH
Slit blades parallelism (HDS)
P424 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at SIX beamline at synchrotron radiation source NSLS-II, USA, 2015 - Bestec GmbH
Slit blades parallelism (HDS)
P424 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at SIX beamline at synchrotron radiation source NSLS-II, USA, 2015 - Bestec GmbH
Slit blades parallelism (HDS)
P424 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at SIX beamline at synchrotron radiation source NSLS-II, USA, 2015 - Bestec GmbH
Slit width calibration (VDS)
P424 - Slit width calibration (VDS) - Exit slit unit for soft X-ray synchrotron radiation at SIX beamline at synchrotron radiation source NSLS-II, USA, 2015 - Bestec GmbH
Slit opening repeatability (VDS)
P424 - Slit opening repeatability (VDS) - Exit slit unit for soft X-ray synchrotron radiation at SIX beamline at synchrotron radiation source NSLS-II, USA, 2015 - Bestec GmbH
Slit blades parallelism (VDS)
P424 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at SIX beamline at synchrotron radiation source NSLS-II, USA, 2015 - Bestec GmbH
Slit blades parallelism (VDS)
P424 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at SIX beamline at synchrotron radiation source NSLS-II, USA, 2015 - Bestec GmbH
Slit blades parallelism (VDS)
P424 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at SIX beamline at synchrotron radiation source NSLS-II, USA, 2015 - Bestec GmbH
Residual gas analysis
P424 - Residual gas analysis - Exit slit unit for soft X-ray synchrotron radiation at SIX beamline at synchrotron radiation source NSLS-II, USA, 2015 - Bestec GmbH

Pictures