Evaporation source cluster
Bestec designs and provides different type of customized and high vacuum (HV) or ultra high vacuum (UHV) compatible evaporation source assamblies to be integrated in a Bestec deposition system or as separate component.
Typical design parameters
- Flanges with one or multiple evaporation sources mounted.
- All assemblies are at least HV compatible (most of them even UHV compatible).
- Wide range of different evaporation techniques possible.
- E.g. E-Beam evaporation, thermal evaporation, organic evaporation (OLED sources), Effussion cells etc.
- Full software control possible via attached controllers.
Options
- Integration of pneumatic or motorized shutter possible.
- Combination of different kind of sources at one cluster flange.
