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P511 - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
P511 - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany

P511 – Mirror Unit M3HB ELISA BESSY HZB

Application

Mirror unit (M3) for soft X-ray synchrotron radiation

Year of delivery

to be delivered 2024

Installation site

ELISA beamline (High Branch) at BESSY II, Helmholtz-Zentrum Berlin, Germany

Design Features

  • Constant-strut-length hexapod mechanism.

  • Six degrees of freedom and selectable rotation center.
  • Spectral range: 50 – 3000 eV.
  • Optical elements: one focusing mirror.
  • Electrode at mirror surface for carbon contamination prevention.
  • Temperature sensor at internal mechanics.
  • Four motorized and encoded OFHC blades at the chamber entrance flange; fluorescence coating of all blades.

  • Mechanically decoupled internal mechanics from the vacuum chamber.
  • Internal mechanics directly connected to the adjustable support structure underneath.
  • Adjustable support structure.
  • Permanently installed bakeout provisions.

Performance Features

  • High step resolution.
  • High pitch rotation stability and repeatability.
  • Minimized mounting induced deformations.

Outer Dimensions

P511 - Outer dimensions - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany

Technical specifications and performance values

General

Vacuum chamber

Chamber type

cylindrical, vertical axis

Main flanges

at the top

Material

1.4404 (C < 0.02%)

Base pressure

10-10 mbar range

Optical design parameters

Beam height

1420 mm

Number of mirrors

1

Surface shape

cylindrical

Mirror dimensions

650 mm x  60 mm x 50 mm

Actuator drives for hexapod axes

Resolution (design value)

0.00157 µm /motor fine step
(1/128, recommended)
0.005 µm /encoder count

Mirror mechanics

Pitch rotation

Range

± 18 mrad

Resolution (calculated value)

0.103 µrad

Resolution (measured value)

0.05 µrad

Repeatability

< 0.50 µrad

Roll rotation

Range

± 10 mrad

Resolution (calculated value)

1.55 µrad

Resolution (measured value)

0.05 µrad

Repeatability

< 0.50 µrad

Yaw rotation

Range

± 10 mrad

Resolution (calculated value)

0.115 µrad

Vertical translation

Range

± 8 mm

Resolution (calculated value)

5 nm

Translation
along surface normal

Range

± 8 mm

Resolution (calculated value)

39.7 nm

Resolution (measured value)

1 µm

Repeatability upon translation

< 0.50 µm

Translation along surface

Range

± 0.50 mm

Resolution (calculated value)

34 nm

Aperture unit

Blades

Material

OFHC

Translation range / blade

30 mm

Resolution (design value)

0.00157 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count

Resolution (measured value)

0.50 µm

Repeatability

< 1 µm

Performance Test Results

Pitch deviation after pitch change
P511 - Pitch deviation after pitch change - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Roll deviation after pitch change
P511 - Roll deviation after pitch change - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Pitch deviation after pitch change
P511 - Pitch deviation after pitch change - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Roll deviation after pitch change
P511 - Roll deviation after pitch change - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Pitch deviation after pitch change
P511 - Pitch deviation after pitch change - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Roll deviation after pitch change
P511 - Roll deviation after pitch change - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Pitch deviation after roll change
P511 - Pitch deviation after roll change - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Roll deviation after roll change
P511 - Roll deviation after roll change - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Pitch deviation after roll change
P511 - Pitch deviation after roll change - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Roll deviation after roll change
P511 - Roll deviation after roll change - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Pitch deviation after roll change
P511 - Pitch deviation after roll change - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Roll deviation after roll change
P511 - Roll deviation after roll change - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Mirror pitch positioning resolution
P511 - Mirror pitch positioning resolution - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Mirror pitch positioning resolution
P511 - Mirror pitch positioning resolution - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Mirror roll positioning resolution
P511 - Mirror roll positioning resolution - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Mirror roll positioning resolution
P511 - Mirror roll positioning resolution - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Position deviation after mirror transversal translation
P511 - Position deviation after mirror translation - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Mirror transversal translation positioning resolution
P511 - Mirror translation positioning resolution - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Blade position deviation after blade translation
P511 - Blade position deviation after blade translation - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Blade translation positioning resolution
P511 - Blade translation positioning resolution - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Residual gas analysis
P511 - Residual gas analysis - Mirror unit (M3HB) for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany