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P508 - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
P508 - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany

P508 – Exit Slit Unit HB ELISA BESSY HZB

Application

Exit slit unit for soft X-ray synchrotron radiation

Year of delivery

2024

Installation site

ELISA beamline (High Branch) at BESSY II, Helmholtz-Zentrum Berlin, Germany

Design Features

  • Double slit mechanism – vertically and horizontally defining slits.
  • Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.

  • Hardened stainless steel slit blades.
  • Electrical isolation and fluorescence coating of horizontally defining slit blades.

  • Motorized and encoded translation of the horizontally defining slit transversal to the beam axis.
  • Manual rotation of the vertically defining slit mechanism around the beam axis.

  • Motorized and encoded slit unit translation along beam axis.
  • Manual slit unit vertical translation.
  • Adjustable support structure.

Performance Features

  • Precision and slit opening repeatability smaller than 150 nm.
  • Parallelism smaller than 0.5 µm over 10 mm edge length.
  • Straightness smaller than 0.3 µm over 10 mm edge length.
  • Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.

Outer Dimensions

P508 - Outer dimensions - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany

Technical specifications and performance values

General

Vacuum chamber

Chamber type

cylindrical, horizontal axis

Main flanges

DN160CF cluster flanges

Base pressure

10-10 mbar range

Translation along beam axis

Range

-200 mm to 200 mm

Resolution (design value)

0.039 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count

Resolution (measured value)

0.50 µm

Vertical translation (manual)

Range

± 3.5 mm

Resolution (design value)

0.66 µm /°

Horizontally defining slit (HDS)

Slit blades

Material

hardened stainless steel,
coated with fluorescence material

Straightness

< 0.20 µm over 10 mm (1σ)

Parallelism

-0.02 µm /mm
(45 µm slit opening)
0.03 µm /mm
(150 µm slit opening)

Slit opening

Range

2.15 µm to 6.10 mm

Repeatability

0.07 µm at 20 µm slit opening

0.07 µm at 100 µm slit opening

0.10 µm at 150 µm slit opening

Resolution (design value)

0.00156 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count

Resolution (measured value)

0.01 µm

Slit translation

Range

-5 mm to 5 mm

Resolution (design value)

0.00156 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count

Resolution (measured value)

0.05 µm

Vertically defining slit (VDS)

Slit blades

Material

hardened stainless steel

Straightness

< 0.30 µm over 10 mm (1σ)

Parallelism

-0.05 µm /mm
(40 µm slit opening)
-0.04 µm /mm
(150 µm slit opening)

Slit opening

Range

2.10 µm to 7.70 mm

Repeatability

0.11 µm at 20 µm slit opening

0.01 µm at 100 µm slit opening

0.06 µm at 150 µm slit opening

Resolution (design value)

0.00156 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count

Resolution (measured value)

0.01 µm

Slit rotation (manual)

Range

± 1°

Performance Test Results

Slit width calibration (HDS)
P508 - Slit width calibration (HDS) - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit opening repeatability (HDS)
P508 - Slit opening repeatability (HDS) - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit blades parallelism (HDS)
P508 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit blades parallelism (HDS)
P508 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit opening positioning resolution (HDS)
P508 - MIM slit opening (HDS) - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit opening positioning resolution (HDS)
Slit translation positioning resolution (HDS)
P508 - MIM slit translation (HDS) - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit translation positioning resolution (HDS)
P508 -MIM slit translation (HDS) - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit translation positioning resolution (HDS)
P508 - MIM slit translation (HDS) - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit width calibration (VDS)
508 - Slit width calibration (VDS) - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit opening repeatability (VDS)
P508 - Slit opening repeatability (VDS) - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit blades parallelism (VDS)
P508 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit blades parallelism (VDS)
P508 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit opening positioning resolution (VDS)
P508 - MIM slit opening (VDS) - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit opening positioning resolution (VDS)
P508 - MIM slit opening (VDS) - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit unit translation positioning resolution
P508 - MIM slit unit translation - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Slit unit translation positioning resolution
P508 - MIM slit unit translation - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany
Residual gas analysis
P508 - Residual gas analysis - Exit slit unit for soft X-ray synchrotron radiation, ELISA (High Branch) beamline at BESSY, Helmholtz-Zentrum Berlin, Germany